Chemical Dry Etching Equipment Market Report 2026

Chemical Dry Etching Equipment Market Overview

• Chemical Dry Etching Equipment market size has reached to $2.22 billion in 2025 • Expected to grow to $3.15 billion in 2030 at a compound annual growth rate (CAGR) of 7.2% • Growth Driver: Surge In Automotive Electronics And Electric Vehicles Fueling The Market Due To Rising Semiconductor Demand • Market Trend: Advanced Plasma Etch Technology Enhances Precision And Productivity In Chemical Dry Etching Equipment • Asia-Pacific was the largest region and fastest growing region.

What Is Covered Under Chemical Dry Etching Equipment Market?

Chemical dry etching equipment is an advanced manufacturing systems that selectively remove material from semiconductor wafers, printed circuit boards (PCBs), and other substrates using reactive gases or plasma rather than liquid chemicals. These systems enable precise pattern transfer for microelectronics fabrication. Chemical dry etching equipment creates fine circuit features with high accuracy, excellent uniformity, and minimal substrate damage, supporting the production of advanced semiconductor and electronic devices. The main product types of chemical dry etching equipment include plasma etching systems, reactive ion etching systems, deep reactive ion etching systems, and other product types. Plasma etching systems refer to semiconductor processing equipment that uses chemically reactive plasma to selectively remove material from substrate surfaces, enabling precise pattern formation and surface modification. These systems are available in single-chamber equipment and multi-chamber equipment configurations and process materials such as silicon, compound semiconductors, and other substrate materials. They are offered as manual equipment, semi-automatic equipment, and fully automatic equipment and are utilized by end use industries including semiconductor, electronics, automotive, aerospace and defense, healthcare, industrial manufacturing, and others.

What Is The Chemical Dry Etching Equipment Market Growth Forecast?

The chemical dry etching equipment market size is expected to see strong growth in the next few years. It will grow to $3.15 billion in 2030 at a compound annual growth rate (CAGR) of 7.2%. The growth in the forecast period can be attributed to increasing demand for advanced semiconductor nodes, rising production of high-performance computing chips, growing demand for compound semiconductor devices, increasing need for finer circuit geometries, rising investment in semiconductor fabrication facilities. Major trends in the forecast period include increasing adoption of high-precision dry etching processes, rising demand for improved etching uniformity, growing use of selective etching techniques, increasing demand for low-damage substrate processing, rising adoption of advanced etching process control.

What Is The Driver Of The Chemical Dry Etching Equipment Market?

The growth in automotive electronics and electric vehicles is expected to propel the growth of the chemical dry etching equipment market going forward. Automotive electronics and electric vehicles refer to electronic systems, components, and electrically powered vehicles that enhance vehicle performance, safety, connectivity, and energy efficiency. The growth in automotive electronics and electric vehicles is driven by increasing demand for advanced safety, connectivity, and energy-efficient technologies, as modern vehicles require sophisticated electronic systems to improve performance, reduce emissions, and enhance the driving experience. Automotive electronics and electric vehicle demand drive the growth in chemical dry etching equipment by enabling the precise fabrication of semiconductor devices, sensors, power electronics, and microelectromechanical systems used in advanced driver assistance systems, battery management systems, electric powertrains, and in-vehicle electronics. For instance, in January 2024, according to a report published by Kelley Blue Book, a US-based Cox Automotive company, in 2023, a record 1.2 million car buyers in the United States chose electric vehicles, which accounted for 7.6% of the entire U.S. vehicle market, up from 5.9% in 2022. Therefore, the growth in automotive electronics and electric vehicles (EVs) is driving the growth of the chemical dry etching equipment industry.

Key Players In The Global Chemical Dry Etching Equipment Market

Major companies operating in the chemical dry etching equipment market are Applied Materials Inc., Lam Research Corporation, Tokyo Electron Limited, Hitachi High-Tech Corporation, Nordson MARCH Inc., ULVAC Inc., Advanced Micro-Fabrication Equipment Inc. China, Oxford Instruments Plasma Technology Limited, Shibaura Mechatronics Corporation, Wonik IPS Co. Ltd., GigaLane Co. Ltd., SENTECH Instruments GmbH, Plasma-Therm LLC, PSK Inc., Samco Inc., SEMES Co. Ltd., Trion Technology Inc., Plasma Etch Inc., Piotech Inc., NAURA Technology Group Co. Ltd.

Global Chemical Dry Etching Equipment Market Trends and Insights

Major companies operating in the chemical dry etching equipment market are focusing on developing advanced plasma etching systems to improve etching precision, process uniformity, and manufacturing efficiency for advanced semiconductor and display applications. Plasma etching systems use reactive gases and plasma to selectively remove material from substrates with high accuracy, enabling the fabrication of fine circuit patterns and display structures. For instance, in August 2023, Tokyo Electron Ltd., a Japan-based semiconductor manufacturing equipment company, launched the Betelex 2700 PICP EX Plus plasma etch module for 8.7th generation flat panel display production. The system features enhanced plasma distribution and temperature control technologies that improve etch uniformity, increase production yield, reduce operating costs, and support high-precision OLED display manufacturing.

What Are Latest Mergers And Acquisitions In The Chemical Dry Etching Equipment Market?

In February 2025, Accuron Technologies Limited, a Singapore-based technology investment and engineering company, acquired Trymax Holding B.V. for an undisclosed amount. With this acquisition, Accuron Technologies aimed to expand its semiconductor equipment portfolio and strengthen its position in the European semiconductor equipment market by adding Trymax’s plasma-based semiconductor manufacturing technologies to its existing portfolio. Trymax Holding B.V. is a Netherlands-based provides dry etching equipment, specifically focusing on plasma-based isotropic etching and light/shallow etching applications.

What Defines the Chemical Dry Etching Equipment Market?

The chemical dry etching equipment market consists of sales of turbomolecular vacuum pumps, endpoint detection modules, and wafer handling robots. Values in this market are ‘factory gate’ values, that is, the value of goods sold by the manufacturers or creators of the goods, whether to other entities (including downstream manufacturers, wholesalers, distributors, and retailers) or directly to end customers. The value of goods in this market includes related services sold by the creators of the goods.

How is Market Value Defined and Measured?

The market value is defined as the revenues that enterprises gain from the sale of goods and/or services within the specified market and geography through sales, grants, or donations in terms of the currency (in USD unless otherwise specified). The revenues for a specified geography are consumption values that are revenues generated by organizations in the specified geography within the market, irrespective of where they are produced. It does not include revenues from resales along the supply chain, either further along the supply chain or as part of other products.

What Key Data and Analysis Are Included in the Chemical Dry Etching Equipment Market Report 2026?

The chemical dry etching equipment market research report is one of a series of new reports from The Business Research Company that provides market statistics, including industry global market size, regional shares, competitors with the market share, detailed market segments, market trends and opportunities, and any further data you may need to thrive in the chemical dry etching equipment industry. The market research report delivers a complete perspective of everything you need, with an in-depth analysis of the current and future state of the industry.